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US Patent Issued to Lam Research on Aug. 18 for "Systems for controlling plasma density distribution profiles including multi-RF zoned substrate supports" (California Inventors)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,712,159, issued on Aug. 18, was assigned to Lam Research Corp. (Fremont, Calif.). "Systems for controlling plasma density distribution profiles... Read More


US Patent Issued to Applied Materials on Aug. 18 for "RF blocker for uniformity control" (Massachusetts, Maine, New Hampshire Inventors)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,712,160, issued on Aug. 18, was assigned to Applied Materials Inc. (Santa Clara, Calif.). "RF blocker for uniformity control" was invented by V... Read More


US Patent Issued to Applied Materials on Aug. 18 for "Bipolar electrostatic chuck electrode designs" (California Inventors)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,712,161, issued on Aug. 18, was assigned to Applied Materials Inc. (Santa Clara, Calif.). "Bipolar electrostatic chuck electrode designs" was i... Read More


US Patent Issued to Applied Materials on Aug. 18 for "Biasable electrostatic chuck" (American, Indian Inventors)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,712,162, issued on Aug. 18, was assigned to Applied Materials Inc. (Santa Clara, Calif.). "Biasable electrostatic chuck" was invented by Paneen... Read More


US Patent Issued to SEMES on Aug. 18 for "Substrate treating apparatus and substrate treating method" (South Korean Inventors)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,712,163, issued on Aug. 18, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea). "Substrate treating apparatus and substrate treati... Read More


US Patent Issued to SAMSUNG ELECTRONICS on Aug. 18 for "Cover wafer and method of cleaning substrate processing apparatus including the same" (South Korean Inventors)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,712,164, issued on Aug. 18, was assigned to SAMSUNG ELECTRONICS Co. Ltd. (Suwon-si, South Korea). "Cover wafer and method of cleaning substrate... Read More


US Patent Issued to Tokyo Electron on Aug. 18 for "Seasoning method and plasma processing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,712,165, issued on Aug. 18, was assigned to Tokyo Electron Ltd. (Tokyo). "Seasoning method and plasma processing apparatus" was invented by Yus... Read More


US Patent Issued to Thermo Fisher Scientific (Bremen) on Aug. 18 for "Mass spectrometer isolation profile analyser" (German Inventors)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,712,166, issued on Aug. 18, was assigned to Thermo Fisher Scientific (Bremen) GmbH (Bremen, Germany). "Mass spectrometer isolation profile anal... Read More


US Patent Issued to UNIVERSITE DE LILLE, INSERM (INSTITUT NATIONAL DE LA SANTE ET DE LA RECHERCHE MEDICALE), CENTRE HOSPITALIER REGIONAL ET UNIVERSITAIRE DE LILLE (CHRU) on Aug. 18 for "System and method for analysing volatile organic compounds (VOC) by low-temperature plasma and mass spectrometry (LTP-MS)" (French Inventors)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,712,167, issued on Aug. 18, was assigned to UNIVERSITE DE LILLE (Lille, France), INSERM (INSTITUT NATIONAL DE LA SANTE ET DE LA RECHERCHE MEDICA... Read More


US Patent Issued to YOUNG IN ACE on Aug. 18 for "Mass spectrometer" (South Korean Inventors)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,712,168, issued on Aug. 18, was assigned to YOUNG IN ACE Co. Ltd. (Anyang-si, South Korea). "Mass spectrometer" was invented by Sungwon Kang (A... Read More